JPH0521871Y2 - - Google Patents

Info

Publication number
JPH0521871Y2
JPH0521871Y2 JP16739488U JP16739488U JPH0521871Y2 JP H0521871 Y2 JPH0521871 Y2 JP H0521871Y2 JP 16739488 U JP16739488 U JP 16739488U JP 16739488 U JP16739488 U JP 16739488U JP H0521871 Y2 JPH0521871 Y2 JP H0521871Y2
Authority
JP
Japan
Prior art keywords
susceptor
wafer
sub
main
radiation emitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16739488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0288233U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16739488U priority Critical patent/JPH0521871Y2/ja
Publication of JPH0288233U publication Critical patent/JPH0288233U/ja
Application granted granted Critical
Publication of JPH0521871Y2 publication Critical patent/JPH0521871Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16739488U 1988-12-23 1988-12-23 Expired - Lifetime JPH0521871Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16739488U JPH0521871Y2 (en]) 1988-12-23 1988-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16739488U JPH0521871Y2 (en]) 1988-12-23 1988-12-23

Publications (2)

Publication Number Publication Date
JPH0288233U JPH0288233U (en]) 1990-07-12
JPH0521871Y2 true JPH0521871Y2 (en]) 1993-06-04

Family

ID=31455648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16739488U Expired - Lifetime JPH0521871Y2 (en]) 1988-12-23 1988-12-23

Country Status (1)

Country Link
JP (1) JPH0521871Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7891975B2 (en) * 2004-08-06 2011-02-22 Hitachi Kokusai Electric, Inc. Heat treatment apparatus and method of manufacturing substrate

Also Published As

Publication number Publication date
JPH0288233U (en]) 1990-07-12

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